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All applications in one system
3D measurement
3D surface roughness metrology by
ISO 25178-606 : 2015
ISO 25178-2 : 2012
ISO 25178-3 : 2012
ISO 16610-61
ISO 16610-62
ISO 16610-71
Components : Premium
Piezo Z-stage + motorized XYZ stage + motorized control nosepiece microscope + WLI lenses + ordinary objective lenses + 3D application software + other motorized stage control applications + workstation computer
Components : Standard
Piezo Z-stage + motorized XYZ stage + microscope + WLI lenses + ordinary objective lenses + 3D application software + workstation computer
Components : Basic
Motorized Z stage + microscope + WLI lenses + ordinary objective lenses + 3D application software + notebook or personal computer